Equipment

Semiconductor Material Deposition

Nitride MOCVD

Showerhead OVPD

Device Processing

UV Lithography

Spincoating und Developing

HV Evaporation

E-beam and thermal evaporation

RTA

Rapid thermal anneal

ICP RIE

Inductively Coupled Plasma Reactive-ion Etching

MW barrel etch

PECVD

Plasma-enhanced Chemical Vapor Deposition

Wafer Dicer

Lift-off & cleaning

Characterization

SEM / REM

Sekundärelektronenmikroskopie / Rasterelektronenmikroskopie

X-Ray diffraction

PL laboratory

Photoluminescence laboratory

OLED Characterization

Photoreflectance

On-wafer Hall

AFM

Atomic force microscopy

DC-IV-CV Prober

High Temperature DC-IV-CV

Pulsed IV