Equipment
Semiconductor Material Deposition
Nitride MOCVD
Showerhead OVPD
Device Processing
UV Lithography
Spincoating und Developing
HV Evaporation
E-beam and thermal evaporation
RTA
Rapid thermal anneal
ICP RIE
Inductively Coupled Plasma Reactive-ion Etching
MW barrel etch
PECVD
Plasma-enhanced Chemical Vapor Deposition
Wafer Dicer
Lift-off & cleaning
Characterization
SEM / REM
Sekundärelektronenmikroskopie / Rasterelektronenmikroskopie
X-Ray diffraction
PL laboratory
Photoluminescence laboratory
OLED Characterization
Photoreflectance
On-wafer Hall
AFM
Atomic force microscopy
DC-IV-CV Prober
High Temperature DC-IV-CV
