GaN Device Technology

Device technology research is focussed on understanding the interaction between the material and device process at the device level and on the development of new process modules for device fabrication. Current topics include:

  • Substrate effects and epitaxial process and layer design for GaN-on-Si power and RF devices
  • Device characterization and TCAD simulation
  • Exploring novel gate module processes like selective-area regrowth, alternative gate dielectrics
  • Development of high-temperature contact metallizations
  • Design and process development for novel vertical device concepts